Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080592 | Film stack simplification for high aspect ratio patterning and vertical scaling | Hui-Jung Wu, Bart J. van Schravendijk, Mark Kawaguchi, Gereng Gunawan, Jay E. Uglow +11 more | 2024-09-03 |
| 12040180 | Nitride films with improved etch selectivity for 3D NAND integration | Pramod Subramonium, Malay Milan Samantaray, Katsunori Yoshizawa, Bart J. VanSchravendijk | 2024-07-16 |
| 11869770 | Selective deposition of etch-stop layer for enhanced patterning | Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2024-01-09 |
| 11859282 | Manifold valve for controlling multiple gases | Damodar Rajaram Shanbhag | 2024-01-02 |