Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967486 | Substrate processing system including dual ion filter for downstream plasma | Chih-Hsun Hsu, Serge Kosche, Stephen Whitten, Shih-Chung Kon, Mark Kawaguchi +3 more | 2024-04-23 |