Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165841 | Dual-frequency, direct-drive inductively coupled plasma source | Maolin Long, Yuhou Wang | 2024-12-10 |
| 12119232 | Etching isolation features and dense features within a substrate | Juline Shoeb, Ying Wu | 2024-10-15 |
| 12057319 | Selective silicon dioxide removal using low pressure low bias deuterium plasma | Juline Shoeb | 2024-08-06 |
| 12046450 | Synchronization of RF generators | Ying Wu, John Drewery, Xiang Zhou, Zhuoxian Wang, Yoshie Kimura | 2024-07-23 |
| 11887819 | Systems for cooling RF heated chamber components | Jon McChesney, Saravanapriyan Sriraman, Richard A. Marsh, John Holland | 2024-01-30 |