Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165872 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, Qing Xu | 2024-12-10 |
| 12087561 | Vacuum pump protection against deposition byproduct buildup | Tom A. Kamp, Haoquan Yan, John Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 12046450 | Synchronization of RF generators | Ying Wu, Alexander Paterson, Xiang Zhou, Zhuoxian Wang, Yoshie Kimura | 2024-07-23 |
| 12040605 | Voltage transient detector and current transient detector | John Pease | 2024-07-16 |
| 12002653 | Systems and methods for compensating for RF power loss | Mathew Evans, Cristofer Addison Flowers | 2024-06-04 |