Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, David Joseph WETZEL, Hong Shih, Satish SRINIVASAN, Yuanping Song +3 more | 2024-10-29 |
| 12087561 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 12072318 | Chamber component cleanliness measurement system | Amir A. Yasseri, Duane Outka, Armen Avoyan, Kennet Baylon, Girish M. HUNDI +1 more | 2024-08-27 |
| 12064795 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2024-08-20 |