Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165872 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, John Drewery | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165872 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Ying Wu, John Drewery | 2024-12-10 |