Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183554 | Bottom and middle edge rings | Hiran R. Rathnasinghe, Shawn Tokairin | 2024-12-31 |
| 12027410 | Edge ring arrangement with moveable edge rings | Haoquan Yan, Robert Griffith O'Neill, Raphael Casaes, Alex Paterson | 2024-07-02 |
| 11887819 | Systems for cooling RF heated chamber components | Saravanapriyan Sriraman, Richard A. Marsh, Alexander Paterson, John Holland | 2024-01-30 |