Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068152 | Semiconductor substrate bevel cleaning | — | 2024-08-20 |
| 11887819 | Systems for cooling RF heated chamber components | Jon McChesney, Richard A. Marsh, Alexander Paterson, John Holland | 2024-01-30 |