Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119232 | Etching isolation features and dense features within a substrate | Alexander Paterson, Ying Wu | 2024-10-15 |
| 12068131 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2024-08-20 |
| 12057319 | Selective silicon dioxide removal using low pressure low bias deuterium plasma | Alexander Paterson | 2024-08-06 |
| 11915912 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2024-02-27 |