Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165872 | Methods and systems for advanced ion control for etching processes | Zhongkui Tan, Qian Fu, Qing Xu, John Drewery | 2024-12-10 |
| 12119232 | Etching isolation features and dense features within a substrate | Juline Shoeb, Alexander Paterson | 2024-10-15 |
| 12068131 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2024-08-20 |
| 12046450 | Synchronization of RF generators | John Drewery, Alexander Paterson, Xiang Zhou, Zhuoxian Wang, Yoshie Kimura | 2024-07-23 |
| 11915912 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2024-02-27 |