Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986923 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986923 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson | 2024-05-21 |