Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033881 | Reduced localized force in electrostatic chucking | Sumanth Banda, Vladimir Knyazik | 2024-07-09 |
| 11887879 | In-situ apparatus for semiconductor process module | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid | 2024-01-30 |