Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2024-10-29 |
| 12074076 | Plasma processing apparatus and plasma processing method | — | 2024-08-27 |
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Shigeru Nakamoto, Kazunori Shinoda +1 more | 2024-07-30 |
| 12051575 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Ryoji Asakura | 2024-07-30 |