Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092963 | Method of determining characteristic of patterning process based on defect for reducing hotspot | Xingyue PENG, Duan-Fu Stephen Hsu, Qinglin Li | 2024-09-17 |
| 11977334 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Rene Konrad Cebulla Hennerkes, Zhan Shi, Xiaoyang Li, Frank Staals | 2024-05-07 |
| 11972194 | Method for determining patterning device pattern based on manufacturability | Roshni Biswas, Cuiping Zhang, Ningning Jia, Jingjing Liu, Quan Zhang | 2024-04-30 |