Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092963 | Method of determining characteristic of patterning process based on defect for reducing hotspot | Xingyue PENG, Rafael C. Howell, Qinglin Li | 2024-09-17 |
| 11977334 | Wavefront optimization for tuning scanner based on performance matching | Christoph Rene Konrad Cebulla Hennerkes, Rafael C. Howell, Zhan Shi, Xiaoyang Li, Frank Staals | 2024-05-07 |
| 11892776 | Imaging via zeroth order suppression | Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Frank Jan TIMMERMANS, Marie-Claire VAN LARE | 2024-02-06 |
| 11886124 | Flows of optimization for patterning processes | — | 2024-01-30 |