Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Patrick Warnaar, Grzegorz Grzela, Mohammadreza Hajiahmadi, Farzad Farhadzadeh +5 more | 2024-10-08 |
| 12050406 | Method for controlling a lithographic apparatus and associated apparatuses | — | 2024-07-30 |
| 11977334 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Christoph Rene Konrad Cebulla Hennerkes, Rafael C. Howell, Zhan Shi, Xiaoyang Li | 2024-05-07 |