Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112969 | Apparatus and methods for wafer chucking on a susceptor for ALD | Kaushal Gangakhedkar | 2024-10-08 |
| 11984343 | Apparatus and methods for semiconductor processing | Kaushal Gangakhedkar | 2024-05-14 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2024-01-30 |