Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12038685 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2024-07-16 |
| 11914283 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Toshiyuki Uno | 2024-02-27 |