Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104243 | Methods and apparatus for processing a substrate | Annamalai Lakshmanan, Jacqueline S. Wrench, Yixiong Yang, Joung Joo Lee, Srinivas Gandikota +3 more | 2024-10-01 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu +4 more | 2024-09-17 |
| 12022650 | Low resistivity DRAM buried word line stack | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan +2 more | 2024-06-25 |