Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176242 | Rotatable thermal processing chamber | Wolfgang Aderhold | 2024-12-24 |
| 11978646 | Thermal chamber with improved thermal uniformity | Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11901195 | Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation | Pradeep SAMPATH KUMAR, Norman L. Tam, Shashank Sharma, Eric Rieske, Michael P. KAMP | 2024-02-13 |