Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, David Joseph WETZEL, John Daugherty, Hong Shih, Satish SRINIVASAN +3 more | 2024-10-29 |
| 11967517 | Electrostatic chuck with ceramic monolithic body | Feng Wang, Keith Gaff, Darrell Ehrlich | 2024-04-23 |
| 11935776 | Electrostatically clamped edge ring | Keith Gaff, Feng Wang | 2024-03-19 |