Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967517 | Electrostatic chuck with ceramic monolithic body | Feng Wang, Christopher Kimball, Darrell Ehrlich | 2024-04-23 |
| 11935776 | Electrostatically clamped edge ring | Christopher Kimball, Feng Wang | 2024-03-19 |