FW

Feng Wang

Lam Research: 2 patents #62 of 408Top 20%
Overall (2024): #167,551 of 561,600Top 30%
2
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
11967517 Electrostatic chuck with ceramic monolithic body Keith Gaff, Christopher Kimball, Darrell Ehrlich 2024-04-23
11935776 Electrostatically clamped edge ring Christopher Kimball, Keith Gaff 2024-03-19