DE

Darrell Ehrlich

Lam Research: 2 patents #62 of 408Top 20%
Overall (2024): #174,591 of 561,600Top 35%
2
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
12131890 Chuck for plasma processing chamber Ann Erickson 2024-10-29
11967517 Electrostatic chuck with ceramic monolithic body Feng Wang, Keith Gaff, Christopher Kimball 2024-04-23