Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131890 | Chuck for plasma processing chamber | Ann Erickson | 2024-10-29 |
| 11967517 | Electrostatic chuck with ceramic monolithic body | Feng Wang, Keith Gaff, Christopher Kimball | 2024-04-23 |