Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142459 | Single chamber flowable film formation and treatments | Khokan Chandra Paul, Adam J. Fischbach, Tsutomu Tanaka | 2024-11-12 |
| 12020965 | Magnetic holding structures for plasma processing applications | Andrew Nguyen, Sathya Swaroop Ganta, Kallol Bera | 2024-06-25 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |