Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142480 | Seam removal in high aspect ratio gap-fill | Qinghua Zhao, Rui Cheng, Ruiyun Huang, Dong-Hyung LEE, Karthik Janakiraman | 2024-11-12 |
| 12077852 | Metal-doped boron films | Rui Cheng, Karthik Janakiraman | 2024-09-03 |
| 12033848 | Processes for depositing sib films | Rui Cheng, Karthik Janakiraman, Abhijit Basu Mallick, Takehito Koshizawa, Bo Qi | 2024-07-09 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2024-04-16 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya | 2024-03-26 |