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Metal oxycarbide resists as leave behind plugs |
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| 11984317 |
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Differential hardmasks for modulation of electrobucket sensitivity |
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| 11953826 |
Lined photobucket structure for back end of line (BEOL) interconnect formation |
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| 11955343 |
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| 11874600 |
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| 11862463 |
Metal oxide nanoparticles as fillable hardmask materials |
Florian Gstrein, Manish Chandhok |
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