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Selective metal removal for conductive interconnects in integrated circuitry |
Kevin Lin, Rahim Kasim, Florian Gstrein |
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| 12131991 |
Self aligned gratings for tight pitch interconnects and methods of fabrication |
Leonard P. GULER, Paul A. Nyhus, Gobind Bisht, Jonathan Laib, David Shykind +5 more |
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| 12087836 |
Contact over active gate structures with metal oxide-caped contacts to inhibit shorting |
Rami Hourani, Richard Vreeland, Giselle Elbaz, Richard E. Schenker, Gurpreet Singh +4 more |
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| 12087594 |
Colored gratings in microelectronic structures |
Gurpreet Singh, Eungnak Han, Richard E. Schenker, Florian Gstrein, Paul A. Nyhus +1 more |
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| 12080639 |
Contact over active gate structures with metal oxide layers to inhibit shorting |
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| 12027458 |
Subtractively patterned interconnect structures for integrated circuits |
Kevin Lin, Noriyuki Sato, Tristan A. Tronic, Michael Christenson, Christopher J. Jezewski +10 more |
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| 11990403 |
Dielectric helmet-based approaches for back end of line (BEOL) interconnect fabrication and structures resulting therefrom |
Kevin Lin, Richard E. Schenker, Jeffery D. Bielefeld, Rami Hourani |
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| 11901404 |
Capacitor architectures in semiconductor devices |
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| 11894270 |
Grating replication using helmets and topographically-selective deposition |
Kevin Lin, Sudipto Naskar, Miriam Reshotko, Rami Hourani |
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| 11887887 |
Interconnect structures and methods of fabrication |
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| 11862463 |
Metal oxide nanoparticles as fillable hardmask materials |
Marie Krysak, Florian Gstrein |
2024-01-02 |