Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Tomoaki Fujimoto, Koichi Fukaya | 2024-09-24 |
| 12094754 | Substrate supporting apparatus and method of controlling substrate supporting apparatus | Takuya Inoue | 2024-09-17 |
| 12053851 | Jig and installation method using same jig | Lien Yin Cheng, Akira Imamura, Junji Kunisawa | 2024-08-06 |
| 12046500 | Transport apparatus and substrate processing apparatus | Hao Yu, Takuya Inoue | 2024-07-23 |
| 11967508 | Damper control system and damper control method | Akira Imamura, Junji Kunisawa | 2024-04-23 |
| 11948827 | Substrate support mechanism, substrate cleaning device and substrate processing method | Hisajiro Nakano, Takuya Inoue | 2024-04-02 |
| 11948811 | Cleaning apparatus and polishing apparatus | Tomoaki Fujimoto, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |
| 11894244 | Cleaning member mounting mechanism and substrate cleaning apparatus | Tomoaki Fujimoto, Takuya Inoue | 2024-02-06 |