Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948827 | Substrate support mechanism, substrate cleaning device and substrate processing method | Mitsuru Miyazaki, Takuya Inoue | 2024-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948827 | Substrate support mechanism, substrate cleaning device and substrate processing method | Mitsuru Miyazaki, Takuya Inoue | 2024-04-02 |