Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Mitsuru Miyazaki, Koichi Fukaya | 2024-09-24 |
| 11948811 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |
| 11894244 | Cleaning member mounting mechanism and substrate cleaning apparatus | Mitsuru Miyazaki, Takuya Inoue | 2024-02-06 |