Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100587 | Substrate cleaning apparatus and cleaning method of substrate | Fumitoshi Oikawa, Tomoaki Fujimoto, Mitsuru Miyazaki | 2024-09-24 |
| 11948811 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Fumitoshi Oikawa, Takuya Inoue | 2024-04-02 |