Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140980 | Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate | Fujihiko Toyomasu | 2024-11-12 |
| 12053851 | Jig and installation method using same jig | Lien Yin Cheng, Akira Imamura, Mitsuru Miyazaki | 2024-08-06 |
| 11967508 | Damper control system and damper control method | Akira Imamura, Mitsuru Miyazaki | 2024-04-23 |
| 11890652 | Cleaning chemical liquid supply device and cleaning chemical liquid supply method | Fujihiko Toyomasu | 2024-02-06 |