Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140980 | Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate | Junji Kunisawa | 2024-11-12 |
| 12042901 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Haiyang Xu | 2024-07-23 |
| 11890652 | Cleaning chemical liquid supply device and cleaning chemical liquid supply method | Junji Kunisawa | 2024-02-06 |