Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Thomas Thaler, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |
| 11892769 | Method for detecting an object structure and apparatus for carrying out the method | Beat Marco Mout, Dirk Seidel, Christoph Husemann | 2024-02-06 |