Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040103 | Imaging optical arrangement to image an object illuminated by X-rays | Johannes Ruoff | 2024-07-16 |
| 11947265 | Optical diffraction component | — | 2024-04-02 |
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Ulrich Matejka, Thomas Thaler, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |
| 11867642 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Thomas A. Zeuner | 2024-01-09 |