Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040103 | Imaging optical arrangement to image an object illuminated by X-rays | Heiko Feldmann | 2024-07-16 |
| 11935228 | Method to acquire a 3D image of a sample structure | Ramani Pichumani, Christoph Graf Vom Hagen, Jens Timo Neumann, Thomas Matthew Gregorich | 2024-03-19 |
| 11927500 | Method and device for characterizing the surface shape of an optical element | Steffen SIEGLER, Alexander Wolf, Michael Carl, Toralf Gruner, Thomas Schicketanz | 2024-03-12 |
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |