Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927500 | Method and device for characterizing the surface shape of an optical element | Steffen SIEGLER, Johannes Ruoff, Alexander Wolf, Michael Carl, Thomas Schicketanz | 2024-03-12 |
| 11906904 | Projection exposure method and projection lens with setting of the pupil transmission | — | 2024-02-20 |