Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Sascha Perlitz, Shao-Chi Wei +2 more | 2024-02-27 |
| 11899358 | Method for measuring photomasks | Dmitry Simakov, Steffen Steinert, Dirk Beyer, Ute Buttgereit | 2024-02-13 |