Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867642 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Heiko Feldmann | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867642 | Inspection device for masks for semiconductor lithography and method | Holger Seitz, Heiko Feldmann | 2024-01-09 |