Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111579 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Alexander Freytag, Dirk Seidel, Carsten Schmidt | 2024-10-08 |
| 12001145 | Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model | Alexander Freytag, Dirk Seidel, Carsten Schmidt, Thomas Scheruebl | 2024-06-04 |
| 11892769 | Method for detecting an object structure and apparatus for carrying out the method | Beat Marco Mout, Dirk Seidel, Ulrich Matejka | 2024-02-06 |