Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135540 | Devices and methods for examining and/or processing an element for photolithography | Michael Budach, Nicole Auth, Christian Rensing, Christian Wojek | 2024-11-05 |
| 12111579 | Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process | Christoph Husemann, Dirk Seidel, Carsten Schmidt | 2024-10-08 |
| 12087041 | Microscopy system and method for generating a virtually stained image | Matthias Eibl, Christian Kungel, Anselm Brachmann, Daniel Haase, Manuel Amthor | 2024-09-10 |
| 12001145 | Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model | Christoph Husemann, Dirk Seidel, Carsten Schmidt, Thomas Scheruebl | 2024-06-04 |