Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12001145 | Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model | Alexander Freytag, Christoph Husemann, Dirk Seidel, Carsten Schmidt | 2024-06-04 |