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Michael Budach

CG Carl Zeiss Smt Gmbh: 3 patents #8 of 148Top 6%
Overall (2024): #74,264 of 561,600Top 15%
3
Patents 2024

Issued Patents 2024

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
12164226 Method and apparatuses for disposing of excess material of a photolithographic mask Christof Baur, Klaus Edinger, Tristan Bret 2024-12-10
12135540 Devices and methods for examining and/or processing an element for photolithography Nicole Auth, Christian Rensing, Alexander Freytag, Christian Wojek 2024-11-05
11874598 Method and apparatuses for disposing of excess material of a photolithographic mask Christof Baur, Klaus Edinger, Tristan Bret 2024-01-16