Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Klaus Edinger, Tristan Bret | 2024-12-10 |
| 11977097 | Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope | Gabriel Baralia, Rainer Becker, Kinga Kornilov, Hans Hermann Pieper | 2024-05-07 |
| 11965910 | Device and method for operating a bending beam in a closed control loop | Florian Demski | 2024-04-23 |
| 11899359 | Method and apparatus for removing a particle from a photolithographic mask | Hans Hermann Pieper | 2024-02-13 |
| 11886126 | Apparatus and method for removing a single particulate from a substrate | Klaus Edinger, Christian Felix Hermanns, Tilo Sielaff, Jens Oster, Maksym Kompaniiets | 2024-01-30 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Klaus Edinger, Tristan Bret | 2024-01-16 |