Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Klaus Edinger | 2024-12-10 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Klaus Edinger | 2024-01-16 |