Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Tristan Bret | 2024-12-10 |
| 11886126 | Apparatus and method for removing a single particulate from a substrate | Christian Felix Hermanns, Tilo Sielaff, Jens Oster, Christof Baur, Maksym Kompaniiets | 2024-01-30 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Tristan Bret | 2024-01-16 |