Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124179 | Method of wafer alignment using at resolution metrology on product features | Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Marc Jurian Kea, Roy Werkman | 2024-10-22 |
| 12044981 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Everhardus Cornelis Mos, Alexander Ypma, Michiel Kupers, Hyunwoo Yu +1 more | 2024-07-23 |