Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12044981 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Weitian Kou, Alexander Ypma, Michiel Kupers, Hyunwoo Yu +1 more | 2024-07-23 |
| 12045555 | Method to label substrates based on process parameters | Vahid BASTANI, Alexander Ypma, Dag Sonntag, Hakki Ergün Cekli, Chenxi Lin | 2024-07-23 |
| 11977034 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Hoite Pieter Theodoor Tolsma, Peter Ten Berge +5 more | 2024-05-07 |