Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898601 | Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method | Antonie Hendrik Verweij, Abraham Alexander Soethoudt, Jan Pieter Van De Poel, Mark Constant Johannes Baggen | 2024-02-13 |
| 11860552 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie +1 more | 2024-01-02 |